JPS60186705A - 光学式粗さ計 - Google Patents

光学式粗さ計

Info

Publication number
JPS60186705A
JPS60186705A JP4276984A JP4276984A JPS60186705A JP S60186705 A JPS60186705 A JP S60186705A JP 4276984 A JP4276984 A JP 4276984A JP 4276984 A JP4276984 A JP 4276984A JP S60186705 A JPS60186705 A JP S60186705A
Authority
JP
Japan
Prior art keywords
measured
beam splitter
receiving element
output
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4276984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0214642B2 (en]
Inventor
Kimiyuki Mitsui
公之 三井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4276984A priority Critical patent/JPS60186705A/ja
Publication of JPS60186705A publication Critical patent/JPS60186705A/ja
Publication of JPH0214642B2 publication Critical patent/JPH0214642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4276984A 1984-03-06 1984-03-06 光学式粗さ計 Granted JPS60186705A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4276984A JPS60186705A (ja) 1984-03-06 1984-03-06 光学式粗さ計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4276984A JPS60186705A (ja) 1984-03-06 1984-03-06 光学式粗さ計

Publications (2)

Publication Number Publication Date
JPS60186705A true JPS60186705A (ja) 1985-09-24
JPH0214642B2 JPH0214642B2 (en]) 1990-04-09

Family

ID=12645178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4276984A Granted JPS60186705A (ja) 1984-03-06 1984-03-06 光学式粗さ計

Country Status (1)

Country Link
JP (1) JPS60186705A (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62134016U (en]) * 1986-02-18 1987-08-24
JPS63250552A (ja) * 1987-04-08 1988-10-18 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
JPH02162789A (ja) * 1988-12-16 1990-06-22 Juki Corp 直接描画方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62134016U (en]) * 1986-02-18 1987-08-24
JPS63250552A (ja) * 1987-04-08 1988-10-18 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
JPH02162789A (ja) * 1988-12-16 1990-06-22 Juki Corp 直接描画方法

Also Published As

Publication number Publication date
JPH0214642B2 (en]) 1990-04-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term